KAWASAKI

無塵型機器人

設備
川崎提供了業界領先的全系列半導體和電子搬運機器人。這些機器人是專為在無塵室中應用而製造的,包括ISO 1級。速度、準確度以及伸展範圍使這些機器人適合搬運精密的半導體晶圓、LCD面板、有機EL,以及太陽能電池板。
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DETAIL
 
 Photo  Model   Arm    Degree
of
freedom
(axes)
Motion Range Maximum
reach(mm)
Repeatability    
(mm)
Cleanliness   Hand
specification  
Controller   Software                 Manual                                
θ1 axis
(rotation・JT2
(°)
Z axis
(up-down・JT3)
(㎜)
θ2 axis
(rotation・JT4)
(°)
H1 axis
(rotation・JT6)
(°)
H2 axis
(rotation・JT7)
(°)
NTS10 Single 4 340 470 340 340 - 1066 ±0.1 (Wafer Center) ISO Class 1 - D60
ISO Class 1
Standard software for oparation
KMTerm
KSUtility Lite
Operation manual
Communication command manual
Introduction procedure for integrated package software (K-Fast)
NTS20 Double 5 340 470 340 340 340 1066 ±0.1 (Wafer Center) ISO Class 1 - D60
ISO Class 1
Standard software for oparation
KMTerm
KSUtility Lite
Operation manual
Communication command manual
Introduction procedure for integrated package software (K-Fast)
TTS10 single 4 340 470 340 340 - 1066 ±0.1 (Wafer Center) ISO Class 1 - D60
ISO Class 1
Standard software for oparation
KMTerm
KSUtility Lite
Operation manual
Communication command manual
Introduction procedure for integrated package software (K-Fast)
TTS20 Double 5 340 470 340 340 340 1066 ±0.1 (Wafer Center) ISO Class 1 - D60
ISO Class 1
Standard software for oparation
KMTerm
KSUtility Lite
Operation manual
Communication command manual
Introduction procedure for integrated package software (K-Fast)