| Photo | Model | Arm | Degree of freedom (axes) |
Motion Range | Maximum reach(mm) |
Repeatability (mm) |
Cleanliness | Hand specification |
Controller | Software | Manual | ||||
| θ1 axis (rotation・JT2 (°) |
Z axis (up-down・JT3) (㎜) |
θ2 axis (rotation・JT4) (°) |
H1 axis (rotation・JT6) (°) |
H2 axis (rotation・JT7) (°) |
|||||||||||
 |
NTS10 | Single | 4 | 340 | 470 | 340 | 340 | - | 1066 | ±0.1 (Wafer Center) | ISO Class 1 | - | D60 ISO Class 1 |
Standard software for oparation KMTerm KSUtility Lite |
Operation manual Communication command manual Introduction procedure for integrated package software (K-Fast) |
|
NTS20 | Double | 5 | 340 | 470 | 340 | 340 | 340 | 1066 | ±0.1 (Wafer Center) | ISO Class 1 | - | D60 ISO Class 1 |
Standard software for oparation KMTerm KSUtility Lite |
Operation manual Communication command manual Introduction procedure for integrated package software (K-Fast) |
 |
TTS10 | single | 4 | 340 | 470 | 340 | 340 | - | 1066 | ±0.1 (Wafer Center) | ISO Class 1 | - | D60 ISO Class 1 |
Standard software for oparation KMTerm KSUtility Lite |
Operation manual Communication command manual Introduction procedure for integrated package software (K-Fast) |
|
TTS20 | Double | 5 | 340 | 470 | 340 | 340 | 340 | 1066 | ±0.1 (Wafer Center) | ISO Class 1 | - | D60 ISO Class 1 |
Standard software for oparation KMTerm KSUtility Lite |
Operation manual Communication command manual Introduction procedure for integrated package software (K-Fast) |
KAWASAKI
無塵型機器人
設備
川崎提供了業界領先的全系列半導體和電子搬運機器人。這些機器人是專為在無塵室中應用而製造的，包括ISO 1級。速度、準確度以及伸展範圍使這些機器人適合搬運精密的半導體晶圓、LCD面板、有機EL，以及太陽能電池板。
加入詢價
川崎提供了業界領先的全系列半導體和電子搬運機器人。這些機器人是專為在無塵室中應用而製造的，包括ISO 1級。速度、準確度以及伸展範圍使這些機器人適合搬運精密的半導體晶圓、LCD面板、有機EL，以及太陽能電池板。
DETAIL