相關式樣及精度規格，可配合客戶需求調整。詳情請洽業務單位。
Glass size section : 430x390 3EA
Plasma Type : Hydrophilic Vacuum Plasma
RF POWER/ Frequency : 1Kw 13.56MHz
Plasma gas : CF4/O2/ Ar /N2
Chamber Volume : 130.8 Liter
Equipment Configuration : Vacuum Chamber, Oil Rotary Pump, MFC, Throttle Valve
Equipment Control : PLC
Using utility : ELEC. Power,CF4, O2, Ar , N2, CDA, Exhaust